Baffled Stream Generator
Original Publication Date: 1981-Sep-01
Included in the Prior Art Database: 2005-Feb-12
Oxidation furnaces require the injection of water for the purpose of generating steam so that silicon dioxide layers can be grown on semi conductor wafers. In most present furnaces the heat is not sufficient to cause rapid vaporization of the water, and thus beads of water sometimes contact the wafers in process, causing erratic oxide growth and the introduction of foreign materials into the oxide surface.