Browse Prior Art Database

Process for Improving Ball Limiting Metallurgy

IP.com Disclosure Number: IPCOM000053273D
Original Publication Date: 1981-Sep-01
Included in the Prior Art Database: 2005-Feb-12

Publishing Venue

IBM

Related People

Authors:
Boyar, S Chiu, GT [+details]

Abstract

High via resistance of ball-limiting metallurgy, resulting from the use of polyimide insulating layers is lowered by a 0(2) plasma ash and a HF dip clean either before or after polyimide film curing.