Decoration of Micro Pits by Planar Quartz Deposition
Original Publication Date: 1981-Sep-01
Included in the Prior Art Database: 2005-Feb-12
Micro-pits, commonly caused by reactive ion etching (RIE), are difficult to monitor due to their very small size. They are often overlooked in visual inspection operations. They can be effectively decorated by deposition of planar quartz to make them easily visible by visual inspection.