Browse Prior Art Database

Decoration of Micro Pits by Planar Quartz Deposition

IP.com Disclosure Number: IPCOM000053289D
Original Publication Date: 1981-Sep-01
Included in the Prior Art Database: 2005-Feb-12

Publishing Venue

IBM

Related People

Authors:
Scrivner, CH [+details]

Abstract

Micro-pits, commonly caused by reactive ion etching (RIE), are difficult to monitor due to their very small size. They are often overlooked in visual inspection operations. They can be effectively decorated by deposition of planar quartz to make them easily visible by visual inspection.