Short Channel Field Effect Transistors In V-Grooves
Original Publication Date: 1980-Jan-01
Included in the Prior Art Database: 2005-Feb-12
An inversion charge transistor, of the type disclosed in the IBM Technical Disclosure Bulletin 21. 86-87 (June 1978), is provided as a Vgroove field-effect transistor with reduced parasitic capacitance, a short channel, high performance and symmetric operation capability.