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Negative X-Ray Resists: A Method For Their Design

IP.com Disclosure Number: IPCOM000053475D
Original Publication Date: 1980-Jan-01
Included in the Prior Art Database: 2005-Feb-12

Publishing Venue

IBM

Related People

Authors:
Gipstein, E Pacansky, J [+details]

Abstract

A method is described by which materials for negative X-ray resists may be selected.