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An improved metal insulator semiconductor field-effect transistor (MISFET) can be made by employing a graded interface between the insulator and the semiconductor which reduces lattice mismatch strain.
English (United States)
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Field-Effect Transistors With Graded Bandgap Gate Insulators
An improved metal insulator semiconductor field-effect transistor (MISFET)
can be made by employing a graded interface between the insulator and the
semiconductor which reduces lattice mismatch strain.
The energy band relationship is shown in the figure. Where the insulator is
SiO(2) and the substrate is Si, a graded Si(x)O(y) region at the interface
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