Method For Improving Yield Of Josephson Tunneling Circuits
Original Publication Date: 1980-Jan-01
Included in the Prior Art Database: 2005-Feb-12
This method has as its goal the improvement of yield of insulation between Josephson tunneling junction counterelectrodes and overlying control lines. One problem with the insulation between counterelectrode and control line is that damage is caused to the counterelectrode surfaces during exposure to photoprocessing treatments and to air during intervening handling and storage. The resulting damage affects, among other things, the nucleating characteristics of the surface on which the insulating material is usually deposited.