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Protection Layers For Nb Films Disclosure Number: IPCOM000053519D
Original Publication Date: 1980-Jan-01
Included in the Prior Art Database: 2005-Feb-12

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Ting, CY Wu, CT [+details]


In the fabrication of Josephson tunneling devices, it is often necessary to use high temperature processes which may degrade the superconducting properties of a film, such as Nb. Therefore, the Nb film is protected by an overcoat layer.