Liquid Phase Epitaxy Furnace With Separate Preheat and Postcool Sections
Original Publication Date: 1981-Oct-01
Included in the Prior Art Database: 2005-Feb-12
A liquid phase epitaxy (LPE) furnace design that does not utilize the cylindrical space above the LPE melt for the preheating and postcooling of the wafers is disclosed. As shown in the drawing, the furnace 10 has an upright cylindrical reactor section 12 containing a crucible 14 that is positioned on pedestal 16. The LPE melt 18 is in the crucible 14. The preheat furnace section 20 is connected to one side of reactor section 12 and the postcool furnace section 22 to the other side.