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Two Dimensional Four Point Probe IC Linewidth Windage and Sheet RHO Monitor

IP.com Disclosure Number: IPCOM000053606D
Original Publication Date: 1981-Oct-01
Included in the Prior Art Database: 2005-Feb-12

Publishing Venue

IBM

Related People

Authors:
Lee, JH [+details]

Abstract

This simple four-point probe arrangement, with computer assisted calculus, provides a simple and precise in-line test monitor for determining linewidth windage (DeltaW) and sheet resistance (Rho(s)) measurements and control. Because the values can directly affect the circuits or device performance, they are important.