Two Dimensional Four Point Probe IC Linewidth Windage and Sheet RHO Monitor
Original Publication Date: 1981-Oct-01
Included in the Prior Art Database: 2005-Feb-12
This simple four-point probe arrangement, with computer assisted calculus, provides a simple and precise in-line test monitor for determining linewidth windage (DeltaW) and sheet resistance (Rho(s)) measurements and control. Because the values can directly affect the circuits or device performance, they are important.