Browse Prior Art Database

Precision End Point Detection

IP.com Disclosure Number: IPCOM000053624D
Original Publication Date: 1981-Oct-01
Included in the Prior Art Database: 2005-Feb-12

Publishing Venue

IBM

Related People

Authors:
Lin, BJ Kaplan, LH [+details]

Abstract

This article relates generally to the development of photoresist and more particularly to the precision end-point detection of such resists.