Browse Prior Art Database

Gettering Device for Vacuum Deposition

IP.com Disclosure Number: IPCOM000053783D
Original Publication Date: 1981-Nov-01
Included in the Prior Art Database: 2005-Feb-12

Publishing Venue

IBM

Related People

Authors:
Lynch, JR [+details]

Abstract

An expanded metal foam can be used for gettering unwanted gases from the inert gases used in vacuum deposition processes. A tubular rod of a metallic foam can be placed in the flow path for the argon gas. Contaminant gases, such as oxygen, can be gettered by the metal foam to improve the vacuum deposition process.