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Procedure for Quartz Pattern Inspections

IP.com Disclosure Number: IPCOM000053884D
Original Publication Date: 1981-Nov-01
Included in the Prior Art Database: 2005-Feb-12

Publishing Venue

IBM

Related People

Authors:
Brooks, GA Chiu, GT Fredericks, EC [+details]

Abstract

Any residual SiO(2) or quartz insulator which remains on the first level of metallurgy in a semiconductor can lead to device malfunction or failure.