The following operators can be used to better focus your queries.
( ) , AND, OR, NOT, W/#
? single char wildcard, not at start
* multi char wildcard, not at start
(Cat? OR feline) AND NOT dog?
Cat? W/5 behavior
(Cat? OR feline) AND traits
Cat AND charact*
This guide provides a more detailed description of the syntax that is supported along with examples.
This search box also supports the look-up of an IP.com Digital Signature (also referred to as Fingerprint); enter the 72-, 48-, or 32-character code to retrieve details of the associated file or submission.
Concept Search - What can I type?
For a concept search, you can enter phrases, sentences, or full paragraphs in English. For example, copy and paste the abstract of a patent application or paragraphs from an article.
Concept search eliminates the need for complex Boolean syntax to inform retrieval. Our Semantic Gist engine uses advanced cognitive semantic analysis to extract the meaning of data. This reduces the chances of missing valuable information, that may result from traditional keyword searching.
Measuring the chrome resistivity allows for a simpler and faster check of the Cr(2)O(3) percentage in chrome films as compared with an Auger analysis commonly made for that purpose.
English (United States)
This text was extracted from a PDF file.
100% of the total text.
Page 1 of 1
Line Monitor of Oxide Content in Cr Films
Measuring the chrome resistivity allows for a simpler and faster check of the
Cr(2)O(3) percentage in chrome films as compared with an Auger analysis
commonly made for that purpose.
First level metal deposition usually utilizes the chromium oxide layer between
the aluminum-copper conductor and the silicon wafer. The amount of oxide in
the chromium film is extremely important in preventing penetration of the
aluminum-copper into the silicon contact and will become even more important
for products which sinter at higher temperatures, placing more demands on the
The normal determination of oxide content is by Auger analysis, which is a
time consuming, spectrographic laboratory technique. It has been found that the
resistivity of the chrome correlates well to the chromium oxide percentage as
determined by Auger analysis. Practically, a quartz disc may be used in each run
to measure the percentage of copper in the aluminum-copper film. Once the
copper percentage is determined, the aluminum-copper is etched off. Then, the
chrome resistivity of the chromium oxide layer is measured. Using the Auger
percentage Cr(2)O(3)-chrome resistivity calibration curve, the approximate
amount of Cr(2)O(3) is determined.