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Line Monitor of Oxide Content in Cr Films

IP.com Disclosure Number: IPCOM000053885D
Original Publication Date: 1981-Nov-01
Included in the Prior Art Database: 2005-Feb-12

Publishing Venue

IBM

Related People

Authors:
Brainard, EJ Giddings, JJ Overmeyer, JJ Williams, TO [+details]

Abstract

Measuring the chrome resistivity allows for a simpler and faster check of the Cr(2)O(3) percentage in chrome films as compared with an Auger analysis commonly made for that purpose.