Electrical Isolation Using Barrier Heights
Original Publication Date: 1981-Nov-01
Included in the Prior Art Database: 2005-Feb-12
In using electrical isolation instead of physical insulation isolation, considerable device savings in the circuit cell design (cell size 51.4 x 32.7 microns) is achievable. A reduction in cell size is achieved by replacing recessed oxide spacing with a barrier height to obtain "electrical" isolation.