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Electrical Isolation Using Barrier Heights

IP.com Disclosure Number: IPCOM000053887D
Original Publication Date: 1981-Nov-01
Included in the Prior Art Database: 2005-Feb-12

Publishing Venue

IBM

Related People

Authors:
Dorler, JA Konian, RR O'Brien, RR Seeger, RO [+details]

Abstract

In using electrical isolation instead of physical insulation isolation, considerable device savings in the circuit cell design (cell size 51.4 x 32.7 microns) is achievable. A reduction in cell size is achieved by replacing recessed oxide spacing with a barrier height to obtain "electrical" isolation.