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Process for Cleaning and Drying Semiconductor Wafers

IP.com Disclosure Number: IPCOM000053896D
Original Publication Date: 1981-Nov-01
Included in the Prior Art Database: 2005-Feb-12

Publishing Venue

IBM

Related People

Authors:
Hottin, C Jover, P Plougonven, C [+details]

Abstract

The subcollector diffusion is a very well known step in silicon wafer processing.