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Non Random Defect Control on Masks

IP.com Disclosure Number: IPCOM000053898D
Original Publication Date: 1981-Nov-01
Included in the Prior Art Database: 2005-Feb-12

Publishing Venue

IBM

Related People

Authors:
Grelou, G [+details]

Abstract

The method which will be described hereunder allows the use of a standard inspection tool, (such as the KLA 100 or 101), normally used to detect random-type defects, as a non-random-defect inspection tool.