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Automatic Inspection and Computation Tool of Patterned Semiconductor Wafers

IP.com Disclosure Number: IPCOM000053899D
Original Publication Date: 1981-Nov-01
Included in the Prior Art Database: 2005-Feb-12

Publishing Venue

IBM

Related People

Authors:
Barret, M [+details]

Abstract

An automatic inspection and computation tool which reveals contaminants and defects, such as bright spots, particles, and scratches in any processing step on semiconductor wafers, is described.