The following operators can be used to better focus your queries.
( ) , AND, OR, NOT, W/#
? single char wildcard, not at start
* multi char wildcard, not at start
(Cat? OR feline) AND NOT dog?
Cat? W/5 behavior
(Cat? OR feline) AND traits
Cat AND charact*
This guide provides a more detailed description of the syntax that is supported along with examples.
This search box also supports the look-up of an IP.com Digital Signature (also referred to as Fingerprint); enter the 72-, 48-, or 32-character code to retrieve details of the associated file or submission.
Concept Search - What can I type?
For a concept search, you can enter phrases, sentences, or full paragraphs in English. For example, copy and paste the abstract of a patent application or paragraphs from an article.
Concept search eliminates the need for complex Boolean syntax to inform retrieval. Our Semantic Gist engine uses advanced cognitive semantic analysis to extract the meaning of data. This reduces the chances of missing valuable information, that may result from traditional keyword searching.
An automatic inspection and computation tool which reveals contaminants and defects, such as bright spots, particles, and scratches in any processing step on semiconductor wafers, is described.
English (United States)
This text was extracted from a PDF file.
This is the abbreviated version, containing approximately
93% of the total text.
Page 1 of 1
Automatic Inspection and Computation Tool of Patterned Semiconductor
An automatic inspection and computation tool which reveals contaminants
and defects, such as bright spots, particles, and scratches in any processing step
on semiconductor wafers, is described.
The tool has been implemented around a commercially available
equipment, the PMC (Particle Measurement Counter), sold by
Millipore-Intertech, Bedford, Massachusetts, which basically consists
of a video camera, counter modules and a video screen. The equipment
was primarily designed for counting particles on membranes (filters).
It has been adapted to the monitoring of defects existing on
semiconductor wafers, mainly by adding an automatic X-Y table (to
support the wafers) and an optical generator to provide a low
incident light beam on the wafers.
The tool permits the count of defects which appear white-colored on a black
background, the contrasting effect being obtained due to the low incident (3
degrees) light beam. The selected area, scanned by the camera, is the central
part of the wafer, the latter represents about 60% of the total surface of the
wafer. (For example, for a 3 1/4-inch wafer, this represents about 120 chips, and
the operation, including counting the defects, lasts for about 1 min. 30 sec.).
Defect images and results are simultaneously displayed on the screen. The tool
which is pluggable to a data collection system operates with good accuracy, and
allows tighter follow-up of the...