Analyzing Optical Phase Structures
Original Publication Date: 1981-Nov-01
Included in the Prior Art Database: 2005-Feb-12
A differential interference arrangement is combined with a light phase analyzer and a signal integrator to reconstruct the light phase profile in the image obtained from a reflecting or transmitting object. The analyzing method is based on an interference set-up for measuring phase differences; a shearing interferometer (Nomarski) is used to avoid stability problems concerning the optical path length and to extend the measuring range to nanometers. The original phase structure is generated (up to a constant) from the differential phase differences of the shearing interferometric image by integration along the shearing direction of the interferometer.