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Ion Implanter Wafer Orientation Indicator Disclosure Number: IPCOM000053978D
Original Publication Date: 1980-Dec-01
Included in the Prior Art Database: 2005-Feb-12

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Hansen, HH Warley, SD [+details]


Ion implantation tools having automatic wafer end stations for loading and unloading provide no method for identifying wafer orientation with respect to ion beams and make it difficult to characterize uniformity of implant dosage which may occur in these tools.