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The figure shows a lapping jig for scanning electron microscope specimen carriers.
English (United States)
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Combined Lapping Jig and Scanning Electron Microscope Specimen
The figure shows a lapping jig for scanning electron microscope specimen
Generally, to microsection non-encapsulated semiconductor devices it is
necessary that they be fixed in a jig, microsectioned, and then transferred into a
scanning electron microscope specimen holder. This transfer requires
considerable handling and alignment of the specimen, especially when it is
necessary to provide multiple sections and scanning electron microscope
photographs of the device, and can result in contamination and damage of the
To alleviate the problem of repositioning the specimen whenever it is
necessary to further microsection the device under study, a two-part jig,
consisting of an angular lapping block 10 and an angular insert 11, is used. The
non-encapsulated specimen 12 to be lap-sectioned is positioned on the angular
insert 11. The insert 11, with the specimen still attached, can be lapped and then
later removed from the angular lapping block 10 and located in a scanning
electron microscope specimen holder (not shown) so that electron microscope
analysis of the lapped specimen can be provided. If further lapping is necessary,
the angular insert with the specimen can now be returned to the lapping block, as
required, without disturbing the sample on the angular insert. This eliminates
handling and alignment of the specimen each time, prevents contamination and
possible damage to...