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Interferometric Device for Measurement of Small Physical Motion

IP.com Disclosure Number: IPCOM000054071D
Original Publication Date: 1980-Dec-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Bjorklund, GC Hope, JD Pole, RV [+details]

Abstract

This interferometric device is useful for rapid and calibrated measurement of physical motion on the scale of a few angstroms or for measuring gas pressure changes on the scale of 0.01 torr. The essential elements of the device are illustrated in Fig. 1.