Browse Prior Art Database

Piezo Travelling Support

IP.com Disclosure Number: IPCOM000054074D
Original Publication Date: 1980-Dec-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Binnig, G Gerber, C [+details]

Abstract

An x-y piezo drive allows to travel by repeated steps in the micron range to any point. A table-like support of piezo ceramic with 8 legs stands on an even plane. It can move in a controlled manner in any direction by alternate placing or lifting respective pairs of legs and by alternate elongation or contraction of respective parts of the table top.