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Reactive Ion Etching Process

IP.com Disclosure Number: IPCOM000054276D
Original Publication Date: 1980-Jan-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Lee, MH Schwartz, GC [+details]

Abstract

Aluminum and Al-Cu metallizations that have been subjected to reactive ion etching (RIE) undergo rapid corrosion. The amount of corrosion can be substantially reduced by treating the aluminum surface that has been subjected to RIE to the following steps. The RIE treated surface is immersed in a dilute sulfuric acid solution, for example, 10/-1/ N for 3 to 5 minutes or more, and then the surface is exposed to an oxidizing atmosphere to form a passivating layer thereon.