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Stable Structure Formation for Vacuum Deposited Layers

IP.com Disclosure Number: IPCOM000054299D
Original Publication Date: 1980-Jan-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Park, KC [+details]

Abstract

A method is described for forming a stable structure for a desired vacuum deposited layer material and substrate, and includes the specific use of borosilicate glass as an intermediate layer on the substrate.