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Removal Of Chrome Layer Utilizing Ion Beam

IP.com Disclosure Number: IPCOM000054381D
Original Publication Date: 1980-Feb-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Chander, N Nair, K [+details]

Abstract

Conventionally, metalized ceramic substrates are fabricated by depositing chrome copper chrome metallurgy over the entire substrate. A layer of photoresist is applied, exposed and developed to remove all three layers of metal everywhere except where circuit lines are desired.