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Silicon Semiconductor Wafer Handler

IP.com Disclosure Number: IPCOM000054414D
Original Publication Date: 1980-Feb-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Goldmann, LS Kelly, JH [+details]

Abstract

Because of their sharp edges, large untouchable areas and brittleness, silicon semiconductor wafers are prone to mishandling while being carried to and from tools and containers. This handler is a simple vacuum-operated device which can be used to pick up support and release a wafer with minimal mechanical shock.