Silicon Semiconductor Wafer Handler
Original Publication Date: 1980-Feb-01
Included in the Prior Art Database: 2005-Feb-13
Because of their sharp edges, large untouchable areas and brittleness, silicon semiconductor wafers are prone to mishandling while being carried to and from tools and containers. This handler is a simple vacuum-operated device which can be used to pick up support and release a wafer with minimal mechanical shock.