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The disclosed device cleans the via holes and the tops of green sheets while they are being transported from the punch station to the verifier station.
English (United States)
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Bernoulli Air Knife Cleaner
The disclosed device cleans the via holes and the tops of green sheets while
they are being transported from the punch station to the verifier station.
The air knife shown in Fig. 1 blows nitrogen out of slot 1 in air knife body 2.
The slot is approximately half the size of via holes 3 to be cleaned in green sheet 4. The nitrogen flows from slot 1 at a velocity of approximately 80 m-sec. The
force from the escaping nitrogen does in no way distort the very fragile green
sheet, since about 98 percent of it forms a Bernoulli air film which keeps the air
knife in close proximity to the green sheet while also effectively cleaning the top
As shown in Fig. 2, transport 11 moves green sheet 12, which is held by
vacuum chuck 13, from punch head to verifier. When air knife 14, which is free
to move inside vacuum chuck 13 between points 16 and 17 (starting and end
positions), arrives at interposer 15 positioned over lower cleaning station 18, it is
held stationary. Particles from via holes and the bottom surface of green sheet 12
are respectively forced into vacuum slot 20 by nitrogen jets 19 and 21 while
particles from the top surface are pushed into vacuum port 22. When air knife 14
arrives at end position 17, interposer 15, which is spring loaded, folds down:
When transport 11 moves in the opposite direction to pick up the next green
sheet, air knife 14 is reset to starting position 16.