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Micromechanical Generation Of Acoustic Waves

IP.com Disclosure Number: IPCOM000054478D
Original Publication Date: 1980-Feb-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Petersen, KE [+details]

Abstract

A micromechanical structure photolithographically produced on silicon by conventional methods is used to generate surface acoustic waves in silicon.