Eliminating Structural Surface Defects During Josephson Junction Fabrication
Original Publication Date: 1980-Feb-01
Included in the Prior Art Database: 2005-Feb-13
For preparing Josephson junctions a base electrode of, e.g., niobium is deposited on a substrate. A RF-sputter cleaning step is required before the tunnel layer can be produced. The tunnel layer in turn undergoes plasma treatment before the top electrode is deposited on it.