Browse Prior Art Database

Modular Wet Process Line

IP.com Disclosure Number: IPCOM000054589D
Original Publication Date: 1980-Mar-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Carroll, JA Sadler, VB [+details]

Abstract

This article describes a wet process line employing a laminar flow clean air supply process module and control panel which is modular in construction, thus allowing custom installation of wet processing tanks to accommodate any process.