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The reliability of cermet thin film resistors is a function of the film thickness. Within a thickness range of approximately 50 Angstroms to 5000 Angstroms thicker films produce the greatest stability.
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Cermet Thin Film Resistors
The reliability of cermet thin film resistors is a function of the film thickness.
Within a thickness range of approximately 50 Angstroms to 5000 Angstroms
thicker films produce the greatest stability.
However, when film thickness is increased, sheet resistance accordingly
decreases. The maximum allowable decrease is limited by the specific design
requirements. It is, therefore, advantageous to create thicker films while not
drastically altering the desired resistivity. Two methods of creating thicker films
without materially affecting the resistivity are described below.
The first method involves the addition of Cr(2) N to the cermet sputtering
The second technique involves introducing oxygen into the atmosphere while
the cermet resistors are being formed by evaporation. The introduction of
oxygen into the atmosphere can easily be achieved by introducing air into the
atmosphere. Various other doping gases can be introduced during sputtering to
achieve other effects.