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High Resolution Photoacoustic Spectroscopy Disclosure Number: IPCOM000054699D
Original Publication Date: 1980-Mar-01
Included in the Prior Art Database: 2005-Feb-13

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Coufal, H Pacansky, J [+details]


Photoacoustic spectroscopy offers an important technological advantage over other forms of spectroscopy by its capability of depth resolution (depth profiling) in solids. The obvious interest in this capability of photoacoustic spectroscopy by the microelectronics industry is in the depth profiling of dopants in semiconductors, e.g., boron vs. silicon.