Browse Prior Art Database

Vacuum Chuck or Turntable

IP.com Disclosure Number: IPCOM000054713D
Original Publication Date: 1980-Mar-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Sanford, A Wightman, WO [+details]

Abstract

A vacuum head can be used to hold and support a thin film of material during a manufacturing process. The head must be porous to transmit the vacuum while providing a firm smooth surface for supporting the material during the processing step, which may be a burnish operation, for instance.