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Method of Measuring Sidewall Angles

IP.com Disclosure Number: IPCOM000054787D
Original Publication Date: 1980-Apr-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Appolonia, MD Fredericks, EC Gati, GS [+details]

Abstract

The sidewall angles of layers, such as resist, oxide and nitride used in integrated circuit manufacture, are nondestructively measured by optical measurement apparatus in the following manner.