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Shield Bernoulli Head

IP.com Disclosure Number: IPCOM000054803D
Original Publication Date: 1980-Apr-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Hansen, HE Poloncic, SJ [+details]

Abstract

Shown is a conventional Bernoulli head 1 mounted by suitable means to an arm which linearly travels from point to point or through an arc, and also has a "Z" motion capability. The addition of a floating, self centering, circular activating shield 2 can greatly enhance the reliability of wafer 5 placement into a circular holder, such as that shown as items 6 and 7.