Shield Bernoulli Head
Original Publication Date: 1980-Apr-01
Included in the Prior Art Database: 2005-Feb-13
Shown is a conventional Bernoulli head 1 mounted by suitable means to an arm which linearly travels from point to point or through an arc, and also has a "Z" motion capability. The addition of a floating, self centering, circular activating shield 2 can greatly enhance the reliability of wafer 5 placement into a circular holder, such as that shown as items 6 and 7.