Browse Prior Art Database

Elimination of Backside Depletion Capacitance

IP.com Disclosure Number: IPCOM000054814D
Original Publication Date: 1980-Apr-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Kaus, G Schmid, G Stoffel, A [+details]

Abstract

Capacitance-voltage (CV) measurements on n-type wafers can be in error due to a metal semiconductor contact on the wafer backside which is of the depletion type.