The following operators can be used to better focus your queries.
( ) , AND, OR, NOT, W/#
? single char wildcard, not at start
* multi char wildcard, not at start
(Cat? OR feline) AND NOT dog?
Cat? W/5 behavior
(Cat? OR feline) AND traits
Cat AND charact*
This guide provides a more detailed description of the syntax that is supported along with examples.
This search box also supports the look-up of an IP.com Digital Signature (also referred to as Fingerprint); enter the 72-, 48-, or 32-character code to retrieve details of the associated file or submission.
Concept Search - What can I type?
For a concept search, you can enter phrases, sentences, or full paragraphs in English. For example, copy and paste the abstract of a patent application or paragraphs from an article.
Concept search eliminates the need for complex Boolean syntax to inform retrieval. Our Semantic Gist engine uses advanced cognitive semantic analysis to extract the meaning of data. This reduces the chances of missing valuable information, that may result from traditional keyword searching.
Semiconductor structures are etched to produce thin samples which are tested by means of an electron microscope.
English (United States)
This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
100% of the total text.
Page 1 of 2
Etching Device for Electron Microscope Testing Small Samples
Semiconductor structures are etched to produce thin samples which are
tested by means of an electron microscope.
Referring to the figure, sample 10, pasted on holder 1, is inserted through a
wall slot into receptacle 2 with water 3, the surface of which is below sample 10.
Receptacle cover 4 of acid-resistant material includes a glass disk 5 which
permits inspection of sample 10 by means of electron microscope 6.
Acid through a first pipe 7 and water through a second pipe (not shown),
arranged at a 90 degrees angle to the first pipe, are directed at sample 10.
Control keys (not shown) are provided for transferring measured quantities of the
water and acid to sample 10. Holder 1 is slanted to readily transfer the liquids
from sample 10 to water 3 at the bottom of receptacle 2, where the acid is diluted
before being drained off.
Sample 10 is illuminated by a light beam derived from light source 8 and
reflected by concave mirror 9.
The unique structure of this device permits (a) a dosed supply of acid to
sample 10, (b) the ready rising of sample 10 before oxidation after etching, and (c) the supervision of the etch process by an operator who is protected from the
poisonous gas produced in receptacle 2.
Page 2 of 2
[This page contains 3 pictures or other non-text objects]