Browse Prior Art Database

Etching Device for Electron Microscope Testing Small Samples

IP.com Disclosure Number: IPCOM000054827D
Original Publication Date: 1980-Apr-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Mirbach, E Schneider, L [+details]

Abstract

Semiconductor structures are etched to produce thin samples which are tested by means of an electron microscope.