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Analytic Device for Determining Foreign Particles in a Gas Atmosphere

IP.com Disclosure Number: IPCOM000054841D
Original Publication Date: 1980-Apr-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Kaus, G Kempf, J Max, E Seybold, D [+details]

Abstract

For the analysis of solid body surfaces methods like SIMS (Secondary Ion Mass Spectroscopy), AES (Auger Electron Spectroscopy), ESCA (Electron Spectroscopy for Chemical Analysis), etc., are known. Their common disadvantage is that they require a complex experimentation apparatus. This article describes an analytic device which permits the quantitative determination of the composition of an original gas atmosphere. The device consists of the following parts: