Browse Prior Art Database

Contact (VIA) Hole Processing Using CF(4)+H(2) Reactive Ion Etching and Liftoff

IP.com Disclosure Number: IPCOM000054924D
Original Publication Date: 1980-Apr-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Ephrath, LM Hunter, WR Luhn, HE [+details]

Abstract

This article describes a method of processing contact holes as used in semiconductor device fabrication. Although the example here is described in terms of intermediate metallurgy, as used in contact holes, the same principles apply to fabrication of via studs between layers of metallization.