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Etchant for Palladium

IP.com Disclosure Number: IPCOM000054932D
Original Publication Date: 1980-Apr-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Horkans, WJ [+details]

Abstract

Palladium is a noble metal and can only be etched highly oxidizing solutions containing a strong complexant for palladium ions. In general, other metals (excluding platinum) also dissolve in such solutions. Thus, it is very difficult to etch palladium selectively. The most common etchant, aqua regia, also dissolves gold.