Browse Prior Art Database

X-Ray Substrate

IP.com Disclosure Number: IPCOM000054937D
Original Publication Date: 1980-Apr-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Feder, R Molzen, WW Speidell, JL [+details]

Abstract

A substrate for X-ray lithography or X-ray microscopy is proposed. The substrate is a composite film having one layer of polymer film and a layer of Si or a silicon compound such as Si(3)N(4) or SiC.