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Concept Search - What can I type?
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A substrate for X-ray lithography or X-ray microscopy is proposed. The substrate is a composite film having one layer of polymer film and a layer of Si or a silicon compound such as Si(3)N(4) or SiC.
English (United States)
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A substrate for X-ray lithography or X-ray microscopy is proposed. The
substrate is a composite film having one layer of polymer film and a layer of Si or
a silicon compound such as Si(3)N(4) or SiC.
It has been found that a composite of Si(3)N(4) approximately 0.1 Mu thick
with a polyimide layer 0.15 Mu thereon is well suited for with standing the rough
handling associated with the preparation of biological samples, which includes
critical point drying.