Browse Prior Art Database

Resistor Fabrication Process Using a Multiple Sheet Resistance Structure

IP.com Disclosure Number: IPCOM000054985D
Original Publication Date: 1980-May-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Goth, GR Lee, CH Thiel, KP [+details]

Abstract

This article describes a technique for the fabrication of resistors of multiple sheet resistance, often needed for large-scale device integration. This technique provides a way to fabricate resistors of three sheet resistance values using only one mask.