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Slip Drive for Free Polishing Disclosure Number: IPCOM000054989D
Original Publication Date: 1980-May-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue


Related People

Hause, JR Mendel, E [+details]


In free polishing, wafers lie unconstrained in carrier or nest apertures positioned between pad covered top and bottom polishing plates. The top and bottom polishing plates are driven in opposite directions.