Browse Prior Art Database

Slip Drive for Free Polishing

IP.com Disclosure Number: IPCOM000054989D
Original Publication Date: 1980-May-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Hause, JR Mendel, E [+details]

Abstract

In free polishing, wafers lie unconstrained in carrier or nest apertures positioned between pad covered top and bottom polishing plates. The top and bottom polishing plates are driven in opposite directions.