Self Aligned Process for Forming Metal Silicide and Polysilicon Composite Base Contact
Original Publication Date: 1980-May-01
Included in the Prior Art Database: 2005-Feb-13
Metal-silicides, such as WSi(2), MOSi(2), PtSi, TaSi(2), etc., have bulk resistivity much lower than the heavily doped P+ polysilicon. A Composite metal-silicide and polysilicon layer can be used to achieve a low resistance contact to a transistor element. In these composited layers polysilicon also provides stress relief for forming the metal-silicide.