O Backlash Quick Disconnect Coupling
Original Publication Date: 1980-May-01
Included in the Prior Art Database: 2005-Feb-13
Advanced X/Y table wafer positioning systems used for electron lithography require that the coupling between the drive motor and table shaft has "0" backlash in order to minimize positioning error. Precise alignment also has to be maintained because any eccentricity in the table shaft will result in vacuum leakage of the ferro-fluidic seal through which the table shaft passes. The coupling also has to provide a means for quickly disconnecting the drive motor for replacement or servicing and be of low inertia in order that the table may be stepped at high speeds.