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Process to Fabricate a Bipolar IC with Reduced Alpha Particle Damage

IP.com Disclosure Number: IPCOM000055015D
Original Publication Date: 1980-May-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Anantha, NG Srinivasan, GR [+details]

Abstract

Alpha particle-induced damage produces soft errors in integrated circuit (IC) memory arrays. In the present trend towards higher density structures, this damage may become a limiting factor in the future of IC devices.