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Preparation of Zn AND Zn Bearing Thin Film Alloys Using a Sn-Zn Evaporant Source

IP.com Disclosure Number: IPCOM000055037D
Original Publication Date: 1980-May-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Griest, AJ [+details]

Abstract

A method of preparing alloy thin films containing small amounts of zinc (Zn) by vacuum deposition is described. Preparation of zinc bearing alloy films poses a special problem because of the high vapor pressure of zinc with respect to most other metals. For example, it is impossible to co-evaporate zinc and aluminum from the same source with any degree of control. All of the Zn will "boil off" (often explosively) before any significant amount of aluminum begins to evaporate. An alternative procedure involves sequential deposition of aluminum and zinc (from separate sources) followed by a homogenization anneal.