Browse Prior Art Database

Source of Cristobalite Standards with Internal Standard

IP.com Disclosure Number: IPCOM000055193D
Original Publication Date: 1980-Jun-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Cistola, AB Dedrick, GW Hoffman, HS [+details]

Abstract

Cristobalite, a form a crystalline silica, is a by-product of the formation of sputtering targets from which resistive films are deposited onto metallized ceramic substrates. There is often a need to verify or test for the amount of cristobalite present in the deposited film. In the only other possible analysis, a sample is dissolved in hydrofluoric acid and then subjected to wet analysis. This testing procedure was unsatisfactory since the cristobalite is a hazardous inhalent when isolated and the hydrofluoric acid is a rather dangerous material requiring special handling. Further, this wet analysis is not the most accurate measuring technique known.