Browse Prior Art Database

Suppression of IR Interference Effects in Silicon Wafers by Doping

IP.com Disclosure Number: IPCOM000055241D
Original Publication Date: 1980-Jun-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Schmitt, A Wagner, H [+details]

Abstract

The characterization of silicon (Si) wafers by optical methods using infrared (IR) radiation is often impeded by interference effects caused by multiple reflections on the Si air interfaces.