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Suppression of IR Interference Effects in Silicon Wafers by Doping Disclosure Number: IPCOM000055241D
Original Publication Date: 1980-Jun-01
Included in the Prior Art Database: 2005-Feb-13

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Schmitt, A Wagner, H [+details]


The characterization of silicon (Si) wafers by optical methods using infrared (IR) radiation is often impeded by interference effects caused by multiple reflections on the Si air interfaces.